Journal of Micro/ Nanolithography, MEMS, and MOEMS

Publisher: S P I E - International Society for Optical Engineering | Publishing Format: Other | Impact Factor:

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) (formerly the Journal of Microlithography, Microfabrication, and Microsystems, 2002–2006) publishes peer-reviewed papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, micro-optoelectromechanical systems, and photonics industries.

Keywords

Nanolithography, Nanoengineering journal

Details

Publication Format: Other

Editor in Chief

Harry Levinson
Country: USA
Email: harry.levinson@globalfoundries.com

Publisher

S P I E - International Society for Optical Engineering
Country: USA
Website: https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems?SSO=1

Please refer to the original journal website for accurate and up to date information.

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