Microsystems & Nanoengineering

A multidisciplinary journal covering microsystems and nanotechnology, including MEMS, NEMS, micro- and nanosensors, nanoelectronics, microfluidics, nanomaterials, microfabrication, biomedical microsystems, and nanoengineering. The journal was launched jointly by Nature Publishing Group and the Institute of Electronics, Chinese Academy of Sciences in 2015.

Keywords

Nanoengineering, nanotechnology, MEMS, NEMS, microfabrication

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